Semiconductor Solutions

Semiconductor Metrology

LightPico revolutionizes semiconductor manufacturing with picometer-level precisionfor defect inspection, process control, and quality assurance. Achieve unprecedented accuracy in nanoscale measurements without destructive testing.

Key Benefits
Picometer-level defect detection
Non-destructive process monitoring
Real-time quality assurance
Cost-effective vs. electron microscopy

Semiconductor Industry Challenges

As semiconductor devices continue to shrink, traditional metrology and inspection methods struggle to meet the demanding requirements of modern fabrication processes.

Shrinking Feature Sizes

Advanced node processes require sub-10nm precision that challenges conventional optical metrology and demands expensive electron beam systems.

Destructive Testing

Electron microscopy and AFM techniques often damage samples, limiting their use for in-line process monitoring and quality control.

Throughput Demands

High-volume manufacturing requires rapid, automated inspection systems that current high-resolution techniques cannot provide.

LightPico Semiconductor Solutions

Our AI-driven optical microscopy delivers electron microscopy resolution while maintaining the speed, cost-effectiveness, and non-destructive nature of optical systems.

Advanced Node Metrology

Measure critical dimensions, line widths, and pattern fidelity at the 5nm node and below with λ/10000 precision. Our technology enables accurate characterization of features that challenge conventional optical systems.

Defect Detection & Classification

Identify and classify nanoscale defects in real-time without sample damage. Our AI algorithms distinguish between different defect types and provide quantitative analysis for process optimization.

In-Line Process Control

Monitor critical process parameters throughout fabrication with high-speed, non-destructive measurements. Enable real-time feedback for immediate process corrections and yield optimization.

Performance Comparison
Resolution
Measurement precision
20pm (λ/10000)
vs. 300nm optical
Speed
Measurement time
Real-time
vs. minutes for EM
Sample Damage
Non-destructive testing
None
vs. destructive EM
Operating Cost
Total cost of ownership
90% Lower
vs. CD-SEM systems

Semiconductor Applications

LightPico technology addresses critical measurement needs across the semiconductor manufacturing process, from wafer inspection to device characterization.

Critical Dimension Metrology

Precise measurement of line widths, spacings, and feature dimensions for advanced lithography process control and yield optimization.

Line width roughness (LWR) analysis
Pitch and spacing measurements
Pattern fidelity assessment
Overlay accuracy verification

Defect Inspection

Automated detection and classification of nanoscale defects including particles, scratches, and pattern anomalies on wafers and masks.

Particle contamination detection
Pattern defect identification
Surface roughness analysis
Yield impact assessment

Process Monitoring

Real-time monitoring of etch, deposition, and planarization processes to ensure consistent results and early problem detection.

Etch depth and profile control
Film thickness uniformity
Surface topography mapping
Process drift detection

Wafer-Level Packaging

Inspection and metrology for advanced packaging technologies including through-silicon vias (TSVs) and micro-bumps.

TSV diameter and profile measurement
Micro-bump height uniformity
Bond pad inspection
Package alignment verification

MEMS Devices

Characterization of microelectromechanical systems with precise measurement of mechanical structures and moving components.

Cantilever dimension analysis
Gap width measurements
Surface texture characterization
Dynamic motion tracking

Research & Development

Support for next-generation device development with ultra-high-resolution characterization capabilities for novel materials and structures.

2D material characterization
Quantum device inspection
Novel structure analysis
Failure analysis support

Return on Investment

LightPico technology delivers significant cost savings and productivity improvements compared to traditional semiconductor metrology solutions.

90%
Cost Reduction

Lower operating costs compared to electron microscopy systems through reduced maintenance, no vacuum requirements, and faster measurements.

10x
Throughput Increase

Real-time measurements enable higher inspection rates and faster process feedback, significantly improving fab productivity.

5%
Yield Improvement

Early defect detection and precise process control lead to measurable improvements in manufacturing yield and product quality.

Transform Your Semiconductor Manufacturing

Experience the future of semiconductor metrology with LightPico's revolutionary picometer-precision technology. Schedule a consultation with our technical experts.

Join leading semiconductor companies already using LightPico technology